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Lattice design of a storage-ring-based light source for generating high-power fully coherent EUV radiation

Yujie Lu, Ao Liu, Changliang Li, Kun Wang, Qinglei Zhang, Weishi Wan, Weijie Fan, Junhao Liu, Ruichun Li, Yanxu Wang, Konglong Wu, Ji Li, Chao Feng

Abstract

We present the physical design and systematic optimization of a high-performance storage ring tailored for the generation of high-power coherent radiation, with particular emphasis on the extreme ultraviolet (EUV) regime. The proposed ring adopts a Double Bend Achromat (DBA) lattice configuration and integrates 12 superconducting wigglers to significantly enhance radiation damping and minimize the natural emittance. And a bypass line is adopted to generate high power coherent radiation. Comprehensive linear and nonlinear beam dynamics analyses have been conducted to ensure beam stability and robustness across the operational parameter space. The optimized design achieves a natural emittance of approximately 0.8 nm and a longitudinal damping time of around 1.4 ms, enabling the efficient buildup of coherent radiation. Three-dimensional numerical simulations, incorporating the previously proposed angular dispersion-induced microbunching (ADM) mechanism, further confirm the system's capability to generate high-power EUV coherent radiation, with output powers reaching the order of several hundred watts. These results underscore the strong potential of the proposed design for applications in coherent photon science and EUV lithography.

Lattice design of a storage-ring-based light source for generating high-power fully coherent EUV radiation

Abstract

We present the physical design and systematic optimization of a high-performance storage ring tailored for the generation of high-power coherent radiation, with particular emphasis on the extreme ultraviolet (EUV) regime. The proposed ring adopts a Double Bend Achromat (DBA) lattice configuration and integrates 12 superconducting wigglers to significantly enhance radiation damping and minimize the natural emittance. And a bypass line is adopted to generate high power coherent radiation. Comprehensive linear and nonlinear beam dynamics analyses have been conducted to ensure beam stability and robustness across the operational parameter space. The optimized design achieves a natural emittance of approximately 0.8 nm and a longitudinal damping time of around 1.4 ms, enabling the efficient buildup of coherent radiation. Three-dimensional numerical simulations, incorporating the previously proposed angular dispersion-induced microbunching (ADM) mechanism, further confirm the system's capability to generate high-power EUV coherent radiation, with output powers reaching the order of several hundred watts. These results underscore the strong potential of the proposed design for applications in coherent photon science and EUV lithography.

Paper Structure

This paper contains 10 sections, 44 equations, 15 figures, 4 tables.

Table of Contents

  1. Introduction
  2. Damping ring design
  3. Linear optics design
  4. Nonlinear beam dynamics
  5. Bypass line design
  6. Lattice design of bypass line
  7. Radiation performance
  8. Conclusion
  9. thin-dipole Model
  10. Envelope method based on wiggler in the storage ring

Figures (15)

  • Figure 1: Schematic layout of storage ring light source based on the angular dispersion-induced microbunching.
  • Figure 2: Beta and dispersion functions for one quarter of the ring.
  • Figure 3: Comparison of the Twiss functions, including the horizontal beta function $\beta_x$ (a), the vertical beta function $\beta_y$ (b), and the horizontal dispersion function $\eta_x$ (c), between the ELEGANT and envelope method incorporating three superconducting wigglers.
  • Figure 4: Frequency map analysis extracted from 1024-turn tracking using Elegant: (a) dynamic aperture with diffusion rates, (b) tune footprint.
  • Figure 5: Local momentum acceptance of one superperiod.
  • ...and 10 more figures