Formation of a Tungsten Co-deposition Layer with Microparticles Using Pulsed Laser Deposition

Abstract

This study performed tungsten (W) co-deposition experiments using pulsed laser deposition under exposure to helium/argon plasma in a linear plasma device. Micron-sized spherical W particles formed under co-deposition conditions. It was suggested that these particles grew from nanoparticles via the electrostatic collection of W ions in the plasma plume before deposition.

Figures (3)

• Figure 1: Schematic of the experimental setup
• Figure 2: SEM micrographs of the W substrate surface: (a) pristine substrate; (b) plasma irradiation only (incident ion energy: 16 eV); (c) W deposition only; and (d-f) co-deposition at incident ion energies of 16 eV, 21 eV, and 31 eV, respectively.
• Figure 3: (a)Size distributions of microparticles for deposition times of 10 and 30 minutes. (b)Total number of microparticles and their size distributions for different deposition times and $T_L$. (c)Total number of microparticles and their size distributions at different incident ion energies.