ScAlN-on-SiC Ku-Band Solidly-Mounted Bidimensional Mode Resonators

TL;DR

This work demonstrates Solidly-Mounted Bidimensional Mode Resonators (S2MRs) leveraging a Sezawa-mode in 30% ScAlN on SiC to operate near $16$ GHz in the Ku-band. Experimental results show a mechanical quality factor $Q_m$ up to $380$, Bode quality factor $Q_{Bode}$ approaching $500$, an electromechanical coupling coefficient $k_t^2$ of $4.5 imes 10^{-2}$, and a figure of merit $FOM = Q_m k_t^2$ exceeding $17$, with power handling above $+20$ dBm for 50 Ω-matched devices. The authors claim these S2MRs exhibit the highest KPIs among solidly mounted resonators in the Ku-band, highlighting their potential for integrating nanoacoustic devices on fast substrates with high-power electronics in military and harsh-environment applications. Collectively, the results suggest a viable path toward rugged, high-performance acoustic resonators compatible with demanding electronic systems and stringent operating conditions.

Abstract

This letter reports on Solidly-Mounted Bidimensional Mode Resonators (S2MRs) exploiting a highly-optimized Sezawa mode in 30% Scandium-doped Aluminum Nitride (ScAlN) on Silicon Carbide (SiC) and operating near 16 GHz. Experimental results demonstrate mechanical quality factors (Qm) as high as 380, Bode quality factors (QBode) approaching 500, electromechanical coupling coefficients (kt2) of 4.5%, an overall Figure of Merit (FOM = Qm kt2) exceeding 17, and power handling greater than 20 dBm for devices closely matched to 50 ohms. To the best of the authors' knowledge, S2MRs exhibit the highest Key Performance Indicators (KPIs) among solidly mounted resonators in the Ku band, paving the way for the integration of nanoacoustic devices on fast substrates with high-power electronics, tailored for military and harsh-environment applications.

Figures (1)

• Figure 1: Magnetization as a function of applied field. It is good practice to explain the significance of the figure in the caption.